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Chloroform Refrigerant R 14 Carbon Tetrafluoride

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Brand: Zhongli Fluoridation
规格: 99.9%-99.999%
Price: Negotiable
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Delivery: Shipment within 3 days since the date of payment
Address: Asia China
Valid until: Never Expire
Updated on: 2011-09-23 09:33
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Details
 
Name:Carbon Tetrafluoride              
Tetrafluoromethane (R14)              
 PFC 14              
CAS:75-73-0              
UN1982              
WM:88.00              
EC NO.:200-896-5              
Molecular Formula: CF4              
Main Application
Two main grades: Industries and electronics.In semiconductor manufacturing, CF4 in               
mixture with oxygen is used for plasma cleaning of CVD reactors.Halocarbon 14 is a              
selective etching agent for many metals, metal silicides and oxides.              
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