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SF6,SF6,Sulfur hexafluoride,etching gas,

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Brand: Zhongli Fluoridation
规格: Industrial & microelectronic grade
Price: Negotiable
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Delivery: Shipment within days since the date of payment
Address: Asia China
Valid until: Never Expire
Updated on: 2011-09-23 09:33
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Quality specification for SF6
Item Unit IEC-376 ASTMD2472 Zhongli Standard
SF6 Purity %(m/m) 99.8 99.8 99.96 99.99
O2+N2 %(m/m) 0.05 0.05 0.02 0.006
CF4 %(m/m) 0.05 0.05 0.02 0.02
Acidity(expressed HF) ug/g 0.3 0.3 0.2 0.2
Hydralysable Fluoride (expressed HF) ug/g 1 1 0.5 0.5
Moisture ug/g 5 Dew p
oint -50
2 2
Oil Content ug/g 10 5 3 2
Toxicity / pass pass pass pass
Total impurity       0.04 0.01
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